Semiconductor device fabrication stands alone as the most complex automated process ever created. With thousands of robots operating in factories worldwide, Persimmon has the automation expertise you need to elevate your system’s performance to unmatched heights.
- High motor torque for large arms - Superior wafer placement repeatability - Corrosion resistance - Linear system architecture support - Substrate position correction - Multiple robot arm configurations:
Dual SCARA (iDual)
Quad (iQuad, Butterfly Quad)
Side-by-Side
SwitchBlade (Dual 2-link Yaw)
Single SCARA
Chemical Vapor Deposition (CVD)
Atomic Layer Deposition (ALD)
- High temperature resistance
- High repeatability
- High motor torque for speed
- Multiple robot arm configurations:
Dual SCARA (iDual)
Quad (iQuad, Butterfly Quad)
Side-by-Side
SwitchBlade (Dual 2-link Yaw)
Single SCARA
Physical Vapor Deposition (PVD)
- High vacuum compatibility
- Superior cleanliness
- High reliability
- Custom arm configurations for transfer chambers:
Frog arms
Dual arms
Asymmetric arms
Removal of photoresist:
- High motor torque for speed
- High reliability
- Multiple robot arm configurations:
Dual SCARA (iDual)
Quad (iQuad, Butterfly Quad)
Side-by-Side
SwitchBlade (Dual 2-link Yaw)
Single SCARA
Doping of wafers:
- High motor torque for high speed
- High reliability
- Small fast arm:
Single SCARA
Quad (iQuad, Butterfly Quad)
Wafer and Panel level:
- High motor torque for high speed
- High reliability
- Small fast arm:
Single SCARA
Quad (iQuad, Butterfly Quad)
200mm Applications:
- High motor torque for high speed
- High reliability
- Small fast arm:
Single SCARA
Quad (iQuad, Butterfly Quad)
Other advanced processes:
Heavy payload capability
Non-standard payload shape / size handling
Smooth motion
Low noise emissions
Backwards compatible command support
Application API for custom functionality
(LED, E-Beam, Mask, Anneal)
Persimmon works closely with its customers to understand and identify the specific vacuum robot requirements for their application. This includes robot size, mounting details, transfer and process chamber constraints, handling and payload requirements, environmental factors, and communication to name a few. Persimmon will engage with Customer to complete a Customer Requirement Specification (CRS) document to ensure deliverables meet expectations and perform to the highest possible standards for the application.
Please contact Persimmon about vacuum automation for your application by completing the form in the “Contact Us” section.